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MEMS capactiance pressure sensor
Posted 2009年10月6日 GMT+2 13:330 Replies
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Hi
I want to know why the capactiance pressure sensor structure is like this?
I mean why there is a hole in the dielectric,although if we use the simple structure of a capacitor,the result would become more better and the capactiance range becomes wider.
The second question is how that thin layer on the fixed electrode can be displaced by pressure changes?
I want to know why the capactiance pressure sensor structure is like this?
I mean why there is a hole in the dielectric,although if we use the simple structure of a capacitor,the result would become more better and the capactiance range becomes wider.
The second question is how that thin layer on the fixed electrode can be displaced by pressure changes?
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Last Post 2009年10月6日 GMT+2 13:33
Hello Amir Tabatabaei
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