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Modeling thermal expansion of 2 bonded wafers
Posted 2023年12月16日 GMT+1 05:391 Reply
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Hello everybody, I modeled the thermal expansion of a silicon wafer that has an etched cavity and is bonded to a glass wafer. I want to determine the effect of different gases in the cavity on the structural deformation of the entire structure. On one side there will be air inside, and on the other side, there will be a non-perfect vacuum (air with very low pressure). The bonded wafers are cooled down from 400 degrees Celsius to room temperature. They are not fixed in place and are only resting on a plate. Please help me implement this structure. Thanks a lot in advance
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Is there a specific step you need help with, or are you looking for generic instruction on how to use COMSOL software? If it's the latter, read below. If it's the former, please explain what you need help with exactly.
Jeff
There are quite a number of resources you can draw upon to learn how to use COMSOL Multiphysics regardless of your specific application. I am mentioning here the main ones, in no specific order, and I should mention that this is not a complete list by any means. I hope it will prove useful to you nonetheless.
First, of course, there is the software's documentation. You can access it through the File > Help > Documentation menu or by browsing your COMSOL installation folder to the "doc" folder. The documentation includes both theory manuals and tutorial manuals. Many tutorial models are also available already set up inside the software via File > Application Libraries.
The COMSOL website also offers many video tutorials on a wide range of topics in theVideo Galleryand worked-out models in theApplication Gallery. You will also find longer archived webinarshere. The COMSOL website also offer aBlog, in which many posts discuss how to simulate specific phenomena or using particular features of the software; they are highly technical and detailed.
COMSOL offers manyinstructor-led training courses.
Finally, and maybe most importantly, I strongly recommend theLearning Centervideos to get a solid foundation for your modeling with COMSOL: they cover the entire process of setting up a model from start to finish, and are a great resource for self training.
-------------------Jeff Hiller