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AFM model
Posted 2024年1月17日 GMT+1 02:06MEMS & Piezoelectric DevicesVersion 5.61 Reply
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I am doing a Project on Atomic Force Microscope and design a flexure with piezo attached to it,it is stacked piezo with 50 element. On giving a potential of 150 V I am getting the deflection of 16 micrometer in the z direction. But on doing experiment I am getting the deflection of 50 micrometer.What could be the reason for this difference and how could I could solve this?
Thank You
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Last Post 2024年1月17日 GMT+1 02:21