sr!com.femlab.server.ModelFileHeaderD%LtagstLcom/femlab/util/FlStringList;Ltypesq~LvrsntLcom/femlab/util/FlVersion;xpwsrcom.femlab.util.FlVersion%/B =IbuildImajorLdatetLjava/lang/String;Lextq~Lnameq~Lrcsq~L reactionExtq~L reactionNameq~xpwtq~t#COMSOL Reaction Engineering Lab 3.5tat COMSOL 3.5q~ w[t $Name: $t$Date: 2008/12/03 17:02:19 $xur[Ljava.lang.String;V{Gxpt modelinfotxfemtguitfem0tg5tg6tfem1tfem1.0tg2tg1tfem625tfem625.0q~q~tfem627tfem627.0tfem628tfem628.0q~q~uq~ q~t femstructt guistructq~ tdrawq~"tgeomtmeshq~"q~"q~#q~$tsolutiontxmeshq~#q~$q~#q~$q~%q~&xsrcom.femlab.api.client.ModelInfo^%Ldescrq~LdocURLq~[imaget[Bxpwur[BTxpPNG  IHDRpIDATx_E3s[hҤD$Շ`"() V>+HhBx@|#D# DxM$H0PBDz{3gw9wI) [&% P`(a0@ 0% P`(a0@ [Ʈ]"ZCС裏r-طo`_}vDo\|#G*@%ӽEt7g;0:rLgt&à%FW^]w݅A$} * :; P.}oċ/cD?=|O<P.y=@ʥ{,c(nz͇:Ke:}'7|3P.{睟s=@TvK/}g@ʥo;3g` R'O(^&8\6cQ(\6c=QKe}?bѧ~(ʾpo0 r'L:Ǣ~#(/;E (SP>sJ@ypL|ۘyCP.1C=;ꫯJض,b/o?}4- x≞AF/\ /DtoC2|￿!WrN<"k (h/< :9bܾ'!aONuG#Ё+;e= ')쉬di%2|t2wd@ED{Ko"N;q@ "̬rd:ħ4G0]H-)\x$ ũ ~IU33%PƦzMKB',4$J{&l[WJ ()jAtCI:Ĝ2mVWxPzֵo.: P=,%'<%H aZ󀲿2 !#Wx,}Z,B(e-&)$%%{܀2o PB)Rv<(IG)L\掉5A攀2 +,R.U} 9@)ez3(sDPJ)m]CNϋwDEqtMPJ@iQ . h^|}q"b`Bef.[tDƷ0JcN (:Tb `%F_,{b3#q[,RpCj_Z4k(yL;ԠW.tƛ )/">\I> +JL<24öՃgR0>Bl1CJJYSj|c=%e@)UwwpNEfXJ&[wk/R5PbfJZN˜_tn)OaG&7}무A+eih>N0+mϠ Ew(h 惨[# t (=֦k|y"z̡Lpɷ9Bt PV0VL7;2x `Jdoʠ=p̽/~'SΔQ{yDž.P67@)ٶ`l%(Jj{Xz9eJAژ%sX. LRa;̘[6oj[f  @)M,o-^Rbv߭νeƁINEEr)LʟJ@M3j %3'2#1*,H;I]8Jb=甝i2MP" HݹPB)+` vD(QdJsMb%fR)'PʾCBFGSEmq֙mjaLR0A>1]ϋRC'R]T/({g)w72x;O=R7-CKɌEMM10k7wϡ >=ʒEPJ+Ǵ.١+LZZYC)啀r/}4B0' MG,+/фRx|s]>szcZ)Z(:9mnn~/=H̖S:@r@2S)ڶhI#uu Z]]h]M8Ʉ )eXV\V~J moiS[AyF!mFM/=xʃgSb7Ki{k9DTe,LˋzIK7qc:A-y:y#^P^07[RKU,](K.u.=g1\:VD̪wa2BYM+P s#eTy=A91-Raji \9eWJ!QPzPjI&CNJwEMntK @Jsul6YWɥ7 +~ n)ӥL#k(#U1G6h=S։ 5RC)9Ȇe5AD*4P*̃Y!:PJqjWn^^:h*.31EZ´~|ݬPN ؝8\RH: G$z*^rZ+"ԓJo ໅%2'Y#*.TbRkʤ)q}M=Ab ܨ/ޮ|>rL 3Ū\9e'(eME9!15GJ[H,6+dq2/+dnꄹA&( -bR\e 4J)J4 (P(b7{z$,Ip = ̏ϐPwU=9l@IXV1t(&IJ {0<0țP4)=8SkE< :҃W߂RM}CCд ؙeLٚ}Wý`$6>jv>h"እ45sP6Ywk5 hWP@ (kd:#ӜmZt*"f4%2&R}J9- >fvӰjN94sʱx pF;tݯx^F3^!/ǜPmkBL) Z\5--;2<'u"Y\4 7pLUhN[ufl@aR炕ؼi#ԋQYf %/;*(tMaNu{xpe7KT :8։,OtZ$I*ѴtvbN (gPw" ?*hr`m9~\& &>xem-̣M꫉>}2CUD{l"RsJ@xsW5K.՛o[֬+ϝ&I9EnSꊗ4 "4v]{TlوSCW_#?ʞ%ic`0@ J% P`0@ J%n%KlIENDB`tmodeldescr_chem/boat_reactort boat_reactorxuq~ t` COMSOL 3.5 a 0 603 $Name: $ $Date: 2008/12/03 17:02:19 $ 624 geom on on off on on on on 0.1 t NavierStokes axi {"u","v","w","p","logk","logd","logw","phi","psi","nrw","nzw"} {"r","phi","z"} chns CHEM {"shlag(2,'u')","shlag(2,'v')","shlag(1,'p')"} 4 2 2 1 2 off _chns Lagp2p1 static Off Off None Off Off Off Off Off ref off {"lm1","lm2","lm3","lm4","lm5","lm6","lm7","lm8","lmpsi"} ideal 0 0 {1,1,1,1,1,1,1,1,1,1,1,1,1,1} sym inlet walltype int outlet uv p noslip ntotstress totstress cont U0in u0 U0in U0in U0in 0 0 v0 0 0 0 ax sym sym sym sym 0 0 {"0","0"} {"0","0"} {"0","0"} {"0","0"} {"0","0"} 1 0 0 0 0 0 0.005 0.005 10 LTIT open 1 0.01 0.05 dw h/2 100 {} {} {} {} {} 0 0 0 1 0 0 velocity 0 0 0 pi/2 h {1,2,3,4,4,4,1,3,5,3,3,3,3,3,3} 1 2 3 1 2 3 1 1 2 1 1 2 1 1 2 1 1 2 {"0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0"} 1 0 rho 1 eta 1 0 0 {} {} 1 0 0 0 0 power 0 0 0 1 1 0 0 0 0.5 1 gls 0.25 0 sc 0.35 0 1 0.1 0 navierstokes usesELM 0 Lagp2p1 0 Lagp2p1 0 {"0"} 0 0 0.25 1 gls 0.5 1 1 Lagp2p1 isoT 1 1 1 1 0 1 1 hmax_chns 0 1 {1,2} 10 ConvDiff axi {"c"} {"r","phi","z"} chcd CHEM {"shlag(2,'c')"} 4 2 2 off _chcd Lag2 static noncons off {} {} {} {} ref off {"lm9"} ideal {"0"} {"0"} 1 {"0"} {"0"} {"0"} {"c0"} {"N0"} {"cont"} {"Nc"} {"C"} {} {} {} {} {1,4,1,1,1,1,1,1,3,1,1,2,1,1,1} 1 1 1 {"0"} 1 {"D"} {"1"} {"1","0","0","1"} {"D_eff","0","0","0"} {"iso"} {"aniso"} {"0"} {"-(k*S_a)*c"} {"1"} {"u"} {"0"} {"v"} {"0"} {"0"} {"0.5"} {"0"} {"pgc"} {"0.25"} {"0"} {"sc"} {"0.35"} {} {} {1,2} {"r","z"} {"ref"} {"shlag(2,'u')","shlag(2,'v')","shlag(1,'p')","shlag(2,'c')"} 4 2 2 1 2 on 1
general
SI {"0","0","0","0"} 1 1 2 1 {1,1} 1 2 3 4 4 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"gls_chns","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"-d(r*(-2*eta_chns*ur+p),ur)","-d(-r*eta_chns*(uz+vr),ur)","-d(r*(-2*eta_chns*ur+p),uz)","-d(-r*eta_chns*(uz+vr),uz)"} {"-d(-r*eta_chns*(vr+uz),ur)","-d(r*(-2*eta_chns*vz+p),ur)","-d(-r*eta_chns*(vr+uz),uz)","-d(r*(-2*eta_chns*vz+p),uz)"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),ur)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),ur)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),uz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),uz)"} {"-d(r*(-2*eta_chns*ur+p),vr)","-d(-r*eta_chns*(uz+vr),vr)","-d(r*(-2*eta_chns*ur+p),vz)","-d(-r*eta_chns*(uz+vr),vz)"} {"-d(-r*eta_chns*(vr+uz),vr)","-d(r*(-2*eta_chns*vz+p),vr)","-d(-r*eta_chns*(vr+uz),vz)","-d(r*(-2*eta_chns*vz+p),vz)"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),vr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),vr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),vz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),vz)"} {"-d(r*(-2*eta_chns*ur+p),pr)","-d(-r*eta_chns*(uz+vr),pr)","-d(r*(-2*eta_chns*ur+p),pz)","-d(-r*eta_chns*(uz+vr),pz)"} {"-d(-r*eta_chns*(vr+uz),pr)","-d(r*(-2*eta_chns*vz+p),pr)","-d(-r*eta_chns*(vr+uz),pz)","-d(r*(-2*eta_chns*vz+p),pz)"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),pr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),pr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),pz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),pz)"} {"-d(r*(-2*eta_chns*ur+p),cr)","-d(-r*eta_chns*(uz+vr),cr)","-d(r*(-2*eta_chns*ur+p),cz)","-d(-r*eta_chns*(uz+vr),cz)"} {"-d(-r*eta_chns*(vr+uz),cr)","-d(r*(-2*eta_chns*vz+p),cr)","-d(-r*eta_chns*(vr+uz),cz)","-d(r*(-2*eta_chns*vz+p),cz)"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),cr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),cr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),cz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),cz)"} {"0"} {"0"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),ur)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),ur)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),uz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),uz)"} {"0"} {"0"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),vr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),vr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),vz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),vz)"} {"0"} {"0"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),pr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),pr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),pz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),pz)"} {"0"} {"0"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),cr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),cr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),cz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),cz)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,u)","-d(-r*rho_chns*(u*vr+v*vz),u)","-d(-r*divU_chns,u)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),u)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,v)","-d(-r*rho_chns*(u*vr+v*vz),v)","-d(-r*divU_chns,v)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),v)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,p)","-d(-r*rho_chns*(u*vr+v*vz),p)","-d(-r*divU_chns,p)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),p)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,c)","-d(-r*rho_chns*(u*vr+v*vz),c)","-d(-r*divU_chns,c)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),c)"} {"0","0","0","-d(r*R_c_chcd,u)","0","0","0","-d(r*R_c_chcd,v)","0","0","0","-d(r*R_c_chcd,p)","0","0","0","-d(r*R_c_chcd,c)"} {"-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p","-r*rho_chns*(u*vr+v*vz)","-r*divU_chns","r*(-u_c_chcd*cr-v_c_chcd*cz)"} {"0","0","0","r*R_c_chcd"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"-d(r*(-2*eta_chns*ur+p),u)","-d(-r*eta_chns*(uz+vr),u)"} {"-d(-r*eta_chns*(vr+uz),u)","-d(r*(-2*eta_chns*vz+p),u)"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),u)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),u)"} {"-d(r*(-2*eta_chns*ur+p),v)","-d(-r*eta_chns*(uz+vr),v)"} {"-d(-r*eta_chns*(vr+uz),v)","-d(r*(-2*eta_chns*vz+p),v)"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),v)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),v)"} {"-d(r*(-2*eta_chns*ur+p),p)","-d(-r*eta_chns*(uz+vr),p)"} {"-d(-r*eta_chns*(vr+uz),p)","-d(r*(-2*eta_chns*vz+p),p)"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),p)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),p)"} {"-d(r*(-2*eta_chns*ur+p),c)","-d(-r*eta_chns*(uz+vr),c)"} {"-d(-r*eta_chns*(vr+uz),c)","-d(r*(-2*eta_chns*vz+p),c)"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),c)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),c)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),u)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),u)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),v)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),v)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),p)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),p)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),c)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),c)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,ur)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,uz)"} {"-d(-r*rho_chns*(u*vr+v*vz),ur)","-d(-r*rho_chns*(u*vr+v*vz),uz)"} {"-d(-r*divU_chns,ur)","-d(-r*divU_chns,uz)"} {"-d(r*(-u_c_chcd*cr-v_c_chcd*cz),ur)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),uz)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,vr)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,vz)"} {"-d(-r*rho_chns*(u*vr+v*vz),vr)","-d(-r*rho_chns*(u*vr+v*vz),vz)"} {"-d(-r*divU_chns,vr)","-d(-r*divU_chns,vz)"} {"-d(r*(-u_c_chcd*cr-v_c_chcd*cz),vr)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),vz)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,pr)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,pz)"} {"-d(-r*rho_chns*(u*vr+v*vz),pr)","-d(-r*rho_chns*(u*vr+v*vz),pz)"} {"-d(-r*divU_chns,pr)","-d(-r*divU_chns,pz)"} {"-d(r*(-u_c_chcd*cr-v_c_chcd*cz),pr)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),pz)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,cr)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,cz)"} {"-d(-r*rho_chns*(u*vr+v*vz),cr)","-d(-r*rho_chns*(u*vr+v*vz),cz)"} {"-d(-r*divU_chns,cr)","-d(-r*divU_chns,cz)"} {"-d(r*(-u_c_chcd*cr-v_c_chcd*cz),cr)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),cz)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*R_c_chcd,ur)","-d(r*R_c_chcd,uz)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*R_c_chcd,vr)","-d(r*R_c_chcd,vz)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*R_c_chcd,pr)","-d(r*R_c_chcd,pz)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*R_c_chcd,cr)","-d(r*R_c_chcd,cz)"} {"r*(-2*eta_chns*ur+p)","-r*eta_chns*(uz+vr)"} {"-r*eta_chns*(vr+uz)","r*(-2*eta_chns*vz+p)"} {"0","0"} {"r*(-Drr_c_chcd*cr-Drz_c_chcd*cz)","r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz)"} {"0","0"} {"0","0"} {"0","0"} {"r*(-Drr_c_chcd*cr-Drz_c_chcd*cz)","r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz)"} 1 1 1 1 1 1 1 1 1 {"u","v","p","c"} sqrt(u^2+v^2) uz-vr ur+vz+u/r rho_chns*U_chns*h/eta_chns r*(rho_chns*(u*ur+v*uz)+pr-F_r_chns)+2*eta_chns*(u/r-ur)-eta_chns*r*(2*urr+uzz+vrz) r*(rho_chns*(u*vr+v*vz)+pz-F_z_chns)-eta_chns*(r*(vrr+uzr)+2*r*vzz+uz+vr) r*rho_chns*u r*rho_chns*v r*eta_chns r*rho_chns nojac(1/max(2*rho_chns*sqrt(emetric(u,v)),48*eta_chns/h^2)) 0.5*nojac(if(u^2+v^2<sqrt(eps),h*U_ref_chns,(u^2+v^2)/sqrt(emetric(u,v)))) rho_chns*r*divU_chns cr -Drr_c_chcd*cr-Drz_c_chcd*cz c*u_c_chcd dflux_c_r_chcd+cflux_c_r_chcd cz -Dzr_c_chcd*cr-Dzz_c_chcd*cz c*v_c_chcd dflux_c_z_chcd+cflux_c_z_chcd r*u_c_chcd r*v_c_chcd sqrt(grad_c_r_chcd^2+grad_c_z_chcd^2) sqrt(dflux_c_r_chcd^2+dflux_c_z_chcd^2) sqrt(cflux_c_r_chcd^2+cflux_c_z_chcd^2) sqrt(tflux_c_r_chcd^2+tflux_c_z_chcd^2) h*sqrt(beta_c_r_chcd^2+beta_c_z_chcd^2)/Dm_c_chcd r*(Drr_c_chcd*u_c_chcd^2+Drz_c_chcd*u_c_chcd*v_c_chcd+Dzr_c_chcd*v_c_chcd*u_c_chcd+Dzz_c_chcd*v_c_chcd^2)/(u_c_chcd^2+v_c_chcd^2+eps) r*(-Drr_c_chcd*crr-Drz_c_chcd*crz+cr*u_c_chcd-Dzr_c_chcd*czr-Dzz_c_chcd*czz+cz*v_c_chcd-R_c_chcd) r*(cr*u_c_chcd+cz*v_c_chcd-R_c_chcd) r*Dts_c_chcd rho eta 0 0 0 1 0 0 0 0 power 0 0 0 1 0 0 0.5 0.25 sc 0.35 1 0.1 0 Lagp2p1 Lagp2p1 -test(nojac(rho_chns)*(nojac(u)*ur+nojac(v)*uz)+pr+2*nojac(eta_chns)*(u/r-ur)/r-nojac(eta_chns)*(2*urr+uzz+vrz))*taum_chns*res_u_chns-test(nojac(rho_chns)*(nojac(u)*vr+nojac(v)*vz)+pz-nojac(eta_chns)*(vrr+uzr+2*vzz+(uz+vr)/r))*taum_chns*res_v_chns-test(divU_chns)*tauc_chns*res_p_chns 0 Lagp2p1 1 1 1 1 0 1 1 hmax_chns 0 1 U_chns D D_eff D D_eff 0 0 D 0 1 u 0 v 0 0 -k*S_a*c {0,0} {0,0} {1,2} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","r*(unr*u_c_chcd_up+unz*v_c_chcd_up+dnr*u_c_chcd_down+dnz*v_c_chcd_down)*c*c_test"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"-u","0","0","0"} {"-u","-v+v0_chns","0","0"} {"-u","-v","0","0"} {"0","0","0","0"} {"0","0","-p","0"} {"-u","-v","0","0"} {"test(-u)","0","0","0"} {"test(-u)","test(-v+v0_chns)","0","0"} {"test(-u)","test(-v)","0","0"} {"0","0","0","0"} {"0","0","test(-p)","0"} {"test(-u)","test(-v)","0","0"} {"0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,u)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,v)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,p)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,c)"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,u)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,v)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,p)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,c)"} {"0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,u)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,v)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,p)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,c)"} {"-d(-r*nr_chns*p,u)","-d(-r*nz_chns*p,u)","0","0","-d(-r*nr_chns*p,v)","-d(-r*nz_chns*p,v)","0","0","-d(-r*nr_chns*p,p)","-d(-r*nz_chns*p,p)","0","0","-d(-r*nr_chns*p,c)","-d(-r*nz_chns*p,c)","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","-d(-c+c0_c_chcd,u)","0","0","0","-d(-c+c0_c_chcd,v)","0","0","0","-d(-c+c0_c_chcd,p)","0","0","0","-d(-c+c0_c_chcd,c)"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c"} {"0","0","0","0"} {"0","0","0","-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c"} {"0","0","0","-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c"} {"-r*nr_chns*p","-r*nz_chns*p","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","-c+c0_c_chcd"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 t` 2 3 4 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"u","v","p","c"} eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz nr_chcd*dflux_c_r_chcd+nz_chcd*dflux_c_z_chcd nr_chcd*cflux_c_r_chcd+nz_chcd*cflux_c_z_chcd nr_chcd*tflux_c_r_chcd+nz_chcd*tflux_c_z_chcd 0 0 0 0 0 0 v0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0.005 0.005 0.005 0.005 0.005 0.005 0.005 0.005 0.005 0.005 10 10 10 10 10 1 1 1 1 1 0.01 0.01 0.01 0.01 0.01 0.05 0.05 0.05 0.05 0.05 0.5*h 0.5*h 0.5*h 0.5*h 0.5*h 100 100 100 100 100 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0.5*pi 0.5*pi 0.5*pi 0.5*pi 0.5*pi h h h h h nr nr nr nr dnr nz nz nz nz dnz 0 0 0 0 0 0 0 0 0 0 1 nr nz 0 0 c0 0 0 0 0 0 {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,2,3,4,4,4,1,3,5,3,3,6,3,3,3} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} 1 2 3 4 4 1 1 1 1 1 1 1 1 1 1 1 {"","","","",""} {"","","","",""} {"","","","",""} {"","","","",""} {"u","v","p","Pinl_chns","c"} 0 {0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,1,2,2,1,1,1,1,1,1,1,1,1,1} 10 c*k*M_Si/rho_Si Delta_Si Silicon deposition rate elcplextr {"1"} {} elcplscalar {"1"} {} {} elcplscalar {"1"} nojac(rho_chns) nojac(1) nojac(max((+(u)^2+(v)^2),(eta_chns/rho_chns/h)^2)) nojac(-1/max(emetric(u,v),(visc_vel_fact_chns*eta_chns/rho_chns)^2*emetric2)) ref ref ref ref ref ref ref ref 0 0 0 0 0 0 0 0 {"1"} {"2"} {"rhoint_g1_chns","vol_g1_chns","u2int_g1_chns","mdt2_cfl_g1_chns"} {"1","2","3","4"} {"4"} elconst nojac(sqrt(-mdt2_cfl_g1_chns)) elcplextr {"1","2"} v u 1 1 1 1 {"1"} {"2"} 2 2 {"1"} {"2"} {"v_2D","u_2D"} local {"r","z"} local {"sqrt(x^2+z^2)","y"} local {"x","y"}

{"PT1"}

{"CO2"} 626 geom on on off on on on on 0.1 t 0 {"x","y","z"} {"xyz"} 1 on 1
coefficient
SI {1,1} {} {0,0} {0,0} {1,1} {} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1} {} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1} {} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1} u_2D*sin(atan2(x,z)) v_2D u_2D*cos(atan2(x,z)) sqrt(u_3D^2+v_3D^2+w_3D^2) u_3D u-component, 3D w_3D w-component, 3D v_3D v-component, 3D Velocity_3D Magnitude of 3D velocity

{"REV2"} {"REV1"} 40[mm] 2.5[mm] 0.5[mm] 2*(R_a^2+R_a*d_w)/(R_a^2*d_cc) 25[Pa] 5e-5[m^2/s] D_amb*1.013e5[Pa]/p_tot D*(1-d_w/d_cc) 8.06e-3[m/s] 28[g/mol] 28[g/mol] 32[g/mol] 8.314[J/(K*mol)] 600[degC] p_tot*(0.2*M_SiH4+0.8*M_N2)/(R_g*T_r) 3.1e-5[Pa*s] 0.2*p_tot/(R_g*T_r) 1[m/s] 2e3[kg/m^3] R_a*v0*rho/eta D Pressure-corrected diffusivity eta Dynamic viscosity v0 Inlet axial flow velocity M_N2 Molar mass, N2 D_amb SiH4 diffusivity in air at 1 atm R_a Wafer radius Re Reynolds number p_tot Total system pressure T_r Reactor temperature M_Si Molar mass, Si R_g Ideal gas constant k Rate constant S_a Specific surface area d_cc Wafer spacing D_eff Effective diffusivity in wafer bundle rho_Si Silicon density d_w Wafer thickness c0 Inlet concentration, SiH4 M_SiH4 Molar mass, SiH4 rho Gas density {0} {0} chns weak COMSOL 3.5 a 0 603 $Name: $ $Date: 2008/12/03 17:02:19 $ 624 geom on on off on on on on 0.1 t NavierStokes axi {"u","v","w","p","logk","logd","logw","phi","psi","nrw","nzw"} {"r","phi","z"} chns CHEM {"shlag(2,'u')","shlag(2,'v')","shlag(1,'p')"} 4 2 2 1 2 off _chns Lagp2p1 static Off Off None Off Off Off Off Off ref off {"lm1","lm2","lm3","lm4","lm5","lm6","lm7","lm8","lmpsi"} ideal 0 0 {1,1,1,1,1,1,1,1,1,1,1,1,1,1} sym inlet walltype int outlet uv p noslip ntotstress totstress cont U0in u0 U0in U0in U0in 0 0 v0 0 0 0 ax sym sym sym sym 0 0 {"0","0"} {"0","0"} {"0","0"} {"0","0"} {"0","0"} 1 0 0 0 0 0 0.005 0.005 10 LTIT open 1 0.01 0.05 dw h/2 100 {} {} {} {} {} 0 0 0 1 0 0 velocity 0 0 0 pi/2 h {1,2,3,4,4,4,1,3,5,3,3,3,3,3,3} 1 2 3 1 2 3 1 1 2 1 1 2 1 1 2 1 1 2 {"0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0"} 1 0 rho 1 eta 1 0 0 {} {} 1 0 0 0 0 power 0 0 0 1 1 0 0 0 0.5 1 gls 0.25 0 sc 0.35 0 1 0.1 0 navierstokes usesELM 0 Lagp2p1 0 Lagp2p1 0 {"0"} 0 0 0.25 1 gls 0.5 1 1 Lagp2p1 isoT 1 1 1 1 0 1 1 hmax_chns 0 1 {1,2} 10 ConvDiff axi {"c"} {"r","phi","z"} chcd CHEM {"shlag(2,'c')"} 4 2 2 off _chcd Lag2 static noncons off {} {} {} {} ref off {"lm9"} ideal {"0"} {"0"} 1 {"0"} {"0"} {"0"} {"c0"} {"N0"} {"cont"} {"Nc"} {"C"} {} {} {} {} {1,4,1,1,1,1,1,1,3,1,1,2,1,1,1} 1 1 1 {"0"} 1 {"D"} {"1"} {"1","0","0","1"} {"D_eff","0","0","0"} {"iso"} {"aniso"} {"0"} {"-(k*S_a)*c"} {"1"} {"u"} {"0"} {"v"} {"0"} {"0"} {"0.5"} {"0"} {"pgc"} {"0.25"} {"0"} {"sc"} {"0.35"} {} {} {1,2} {"r","z"} {"ref"} {"shlag(2,'u')","shlag(2,'v')","shlag(1,'p')","shlag(2,'c')"} 4 2 2 1 2 on 1
general
SI {"0","0","0","0"} 1 1 2 1 {1,1} 1 2 3 4 4 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"gls_chns","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"-d(r*(-2*eta_chns*ur+p),ur)","-d(-r*eta_chns*(uz+vr),ur)","-d(r*(-2*eta_chns*ur+p),uz)","-d(-r*eta_chns*(uz+vr),uz)"} {"-d(-r*eta_chns*(vr+uz),ur)","-d(r*(-2*eta_chns*vz+p),ur)","-d(-r*eta_chns*(vr+uz),uz)","-d(r*(-2*eta_chns*vz+p),uz)"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),ur)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),ur)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),uz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),uz)"} {"-d(r*(-2*eta_chns*ur+p),vr)","-d(-r*eta_chns*(uz+vr),vr)","-d(r*(-2*eta_chns*ur+p),vz)","-d(-r*eta_chns*(uz+vr),vz)"} {"-d(-r*eta_chns*(vr+uz),vr)","-d(r*(-2*eta_chns*vz+p),vr)","-d(-r*eta_chns*(vr+uz),vz)","-d(r*(-2*eta_chns*vz+p),vz)"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),vr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),vr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),vz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),vz)"} {"-d(r*(-2*eta_chns*ur+p),pr)","-d(-r*eta_chns*(uz+vr),pr)","-d(r*(-2*eta_chns*ur+p),pz)","-d(-r*eta_chns*(uz+vr),pz)"} {"-d(-r*eta_chns*(vr+uz),pr)","-d(r*(-2*eta_chns*vz+p),pr)","-d(-r*eta_chns*(vr+uz),pz)","-d(r*(-2*eta_chns*vz+p),pz)"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),pr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),pr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),pz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),pz)"} {"-d(r*(-2*eta_chns*ur+p),cr)","-d(-r*eta_chns*(uz+vr),cr)","-d(r*(-2*eta_chns*ur+p),cz)","-d(-r*eta_chns*(uz+vr),cz)"} {"-d(-r*eta_chns*(vr+uz),cr)","-d(r*(-2*eta_chns*vz+p),cr)","-d(-r*eta_chns*(vr+uz),cz)","-d(r*(-2*eta_chns*vz+p),cz)"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),cr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),cr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),cz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),cz)"} {"0"} {"0"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),ur)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),ur)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),uz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),uz)"} {"0"} {"0"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),vr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),vr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),vz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),vz)"} {"0"} {"0"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),pr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),pr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),pz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),pz)"} {"0"} {"0"} {"0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),cr)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),cr)","-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),cz)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),cz)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,u)","-d(-r*rho_chns*(u*vr+v*vz),u)","-d(-r*divU_chns,u)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),u)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,v)","-d(-r*rho_chns*(u*vr+v*vz),v)","-d(-r*divU_chns,v)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),v)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,p)","-d(-r*rho_chns*(u*vr+v*vz),p)","-d(-r*divU_chns,p)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),p)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,c)","-d(-r*rho_chns*(u*vr+v*vz),c)","-d(-r*divU_chns,c)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),c)"} {"0","0","0","-d(r*R_c_chcd,u)","0","0","0","-d(r*R_c_chcd,v)","0","0","0","-d(r*R_c_chcd,p)","0","0","0","-d(r*R_c_chcd,c)"} {"-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p","-r*rho_chns*(u*vr+v*vz)","-r*divU_chns","r*(-u_c_chcd*cr-v_c_chcd*cz)"} {"0","0","0","r*R_c_chcd"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"-d(r*(-2*eta_chns*ur+p),u)","-d(-r*eta_chns*(uz+vr),u)"} {"-d(-r*eta_chns*(vr+uz),u)","-d(r*(-2*eta_chns*vz+p),u)"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),u)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),u)"} {"-d(r*(-2*eta_chns*ur+p),v)","-d(-r*eta_chns*(uz+vr),v)"} {"-d(-r*eta_chns*(vr+uz),v)","-d(r*(-2*eta_chns*vz+p),v)"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),v)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),v)"} {"-d(r*(-2*eta_chns*ur+p),p)","-d(-r*eta_chns*(uz+vr),p)"} {"-d(-r*eta_chns*(vr+uz),p)","-d(r*(-2*eta_chns*vz+p),p)"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),p)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),p)"} {"-d(r*(-2*eta_chns*ur+p),c)","-d(-r*eta_chns*(uz+vr),c)"} {"-d(-r*eta_chns*(vr+uz),c)","-d(r*(-2*eta_chns*vz+p),c)"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),c)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),c)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),u)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),u)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),v)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),v)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),p)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),p)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*(-Drr_c_chcd*cr-Drz_c_chcd*cz),c)","-d(r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz),c)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,ur)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,uz)"} {"-d(-r*rho_chns*(u*vr+v*vz),ur)","-d(-r*rho_chns*(u*vr+v*vz),uz)"} {"-d(-r*divU_chns,ur)","-d(-r*divU_chns,uz)"} {"-d(r*(-u_c_chcd*cr-v_c_chcd*cz),ur)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),uz)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,vr)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,vz)"} {"-d(-r*rho_chns*(u*vr+v*vz),vr)","-d(-r*rho_chns*(u*vr+v*vz),vz)"} {"-d(-r*divU_chns,vr)","-d(-r*divU_chns,vz)"} {"-d(r*(-u_c_chcd*cr-v_c_chcd*cz),vr)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),vz)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,pr)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,pz)"} {"-d(-r*rho_chns*(u*vr+v*vz),pr)","-d(-r*rho_chns*(u*vr+v*vz),pz)"} {"-d(-r*divU_chns,pr)","-d(-r*divU_chns,pz)"} {"-d(r*(-u_c_chcd*cr-v_c_chcd*cz),pr)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),pz)"} {"-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,cr)","-d(-r*rho_chns*(u*ur+v*uz)-2*eta_chns*u/r+p,cz)"} {"-d(-r*rho_chns*(u*vr+v*vz),cr)","-d(-r*rho_chns*(u*vr+v*vz),cz)"} {"-d(-r*divU_chns,cr)","-d(-r*divU_chns,cz)"} {"-d(r*(-u_c_chcd*cr-v_c_chcd*cz),cr)","-d(r*(-u_c_chcd*cr-v_c_chcd*cz),cz)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*R_c_chcd,ur)","-d(r*R_c_chcd,uz)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*R_c_chcd,vr)","-d(r*R_c_chcd,vz)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*R_c_chcd,pr)","-d(r*R_c_chcd,pz)"} {"0","0"} {"0","0"} {"0","0"} {"-d(r*R_c_chcd,cr)","-d(r*R_c_chcd,cz)"} {"r*(-2*eta_chns*ur+p)","-r*eta_chns*(uz+vr)"} {"-r*eta_chns*(vr+uz)","r*(-2*eta_chns*vz+p)"} {"0","0"} {"r*(-Drr_c_chcd*cr-Drz_c_chcd*cz)","r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz)"} {"0","0"} {"0","0"} {"0","0"} {"r*(-Drr_c_chcd*cr-Drz_c_chcd*cz)","r*(-Dzr_c_chcd*cr-Dzz_c_chcd*cz)"} 1 1 1 1 1 1 1 1 1 {"u","v","p","c"} sqrt(u^2+v^2) uz-vr ur+vz+u/r rho_chns*U_chns*h/eta_chns r*(rho_chns*(u*ur+v*uz)+pr-F_r_chns)+2*eta_chns*(u/r-ur)-eta_chns*r*(2*urr+uzz+vrz) r*(rho_chns*(u*vr+v*vz)+pz-F_z_chns)-eta_chns*(r*(vrr+uzr)+2*r*vzz+uz+vr) r*rho_chns*u r*rho_chns*v r*eta_chns r*rho_chns nojac(1/max(2*rho_chns*sqrt(emetric(u,v)),48*eta_chns/h^2)) 0.5*nojac(if(u^2+v^2<sqrt(eps),h*U_ref_chns,(u^2+v^2)/sqrt(emetric(u,v)))) rho_chns*r*divU_chns cr -Drr_c_chcd*cr-Drz_c_chcd*cz c*u_c_chcd dflux_c_r_chcd+cflux_c_r_chcd cz -Dzr_c_chcd*cr-Dzz_c_chcd*cz c*v_c_chcd dflux_c_z_chcd+cflux_c_z_chcd r*u_c_chcd r*v_c_chcd sqrt(grad_c_r_chcd^2+grad_c_z_chcd^2) sqrt(dflux_c_r_chcd^2+dflux_c_z_chcd^2) sqrt(cflux_c_r_chcd^2+cflux_c_z_chcd^2) sqrt(tflux_c_r_chcd^2+tflux_c_z_chcd^2) h*sqrt(beta_c_r_chcd^2+beta_c_z_chcd^2)/Dm_c_chcd r*(Drr_c_chcd*u_c_chcd^2+Drz_c_chcd*u_c_chcd*v_c_chcd+Dzr_c_chcd*v_c_chcd*u_c_chcd+Dzz_c_chcd*v_c_chcd^2)/(u_c_chcd^2+v_c_chcd^2+eps) r*(-Drr_c_chcd*crr-Drz_c_chcd*crz+cr*u_c_chcd-Dzr_c_chcd*czr-Dzz_c_chcd*czz+cz*v_c_chcd-R_c_chcd) r*(cr*u_c_chcd+cz*v_c_chcd-R_c_chcd) r*Dts_c_chcd rho eta 0 0 0 1 0 0 0 0 power 0 0 0 1 0 0 0.5 0.25 sc 0.35 1 0.1 0 Lagp2p1 Lagp2p1 -test(nojac(rho_chns)*(nojac(u)*ur+nojac(v)*uz)+pr+2*nojac(eta_chns)*(u/r-ur)/r-nojac(eta_chns)*(2*urr+uzz+vrz))*taum_chns*res_u_chns-test(nojac(rho_chns)*(nojac(u)*vr+nojac(v)*vz)+pz-nojac(eta_chns)*(vrr+uzr+2*vzz+(uz+vr)/r))*taum_chns*res_v_chns-test(divU_chns)*tauc_chns*res_p_chns 0 Lagp2p1 1 1 1 1 0 1 1 hmax_chns 0 1 U_chns D D_eff D D_eff 0 0 D 0 1 u 0 v 0 0 -k*S_a*c {0,0} {0,0} {1,2} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","r*(unr*u_c_chcd_up+unz*v_c_chcd_up+dnr*u_c_chcd_down+dnz*v_c_chcd_down)*c*c_test"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"-u","0","0","0"} {"-u","-v+v0_chns","0","0"} {"-u","-v","0","0"} {"0","0","0","0"} {"0","0","-p","0"} {"-u","-v","0","0"} {"test(-u)","0","0","0"} {"test(-u)","test(-v+v0_chns)","0","0"} {"test(-u)","test(-v)","0","0"} {"0","0","0","0"} {"0","0","test(-p)","0"} {"test(-u)","test(-v)","0","0"} {"0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,u)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,v)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,p)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,c)"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,u)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,v)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,p)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,c)"} {"0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,u)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,v)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,p)","0","0","0","-d(-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c,c)"} {"-d(-r*nr_chns*p,u)","-d(-r*nz_chns*p,u)","0","0","-d(-r*nr_chns*p,v)","-d(-r*nz_chns*p,v)","0","0","-d(-r*nr_chns*p,p)","-d(-r*nz_chns*p,p)","0","0","-d(-r*nr_chns*p,c)","-d(-r*nz_chns*p,c)","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","-d(-c+c0_c_chcd,u)","0","0","0","-d(-c+c0_c_chcd,v)","0","0","0","-d(-c+c0_c_chcd,p)","0","0","0","-d(-c+c0_c_chcd,c)"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","0","0","0","0","0","0","0","0","0","0","0","0","0"} {"0","0","0","-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c"} {"0","0","0","0"} {"0","0","0","-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c"} {"0","0","0","-r*(-nr_chcd*u_c_chcd-nz_chcd*v_c_chcd)*c"} {"-r*nr_chns*p","-r*nz_chns*p","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","-c+c0_c_chcd"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} {"0","0","0","0"} 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 1 1 2 1 {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"","","",""} {"u","v","p","c"} eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) eta_chns*(2*nr_chns*ur+nz_chns*(uz+vr)) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) -nr_chns*p+2*nr_chns*eta_chns*ur+nz_chns*eta_chns*(uz+vr) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) eta_chns*(nr_chns*(vr+uz)+2*nz_chns*vz) -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz -nz_chns*p+nr_chns*eta_chns*(vr+uz)+2*nz_chns*eta_chns*vz nr_chcd*dflux_c_r_chcd+nz_chcd*dflux_c_z_chcd nr_chcd*cflux_c_r_chcd+nz_chcd*cflux_c_z_chcd nr_chcd*tflux_c_r_chcd+nz_chcd*tflux_c_z_chcd 0 0 0 0 0 0 v0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0.005 0.005 0.005 0.005 0.005 0.005 0.005 0.005 0.005 0.005 10 10 10 10 10 1 1 1 1 1 0.01 0.01 0.01 0.01 0.01 0.05 0.05 0.05 0.05 0.05 0.5*h 0.5*h 0.5*h 0.5*h 0.5*h 100 100 100 100 100 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0.5*pi 0.5*pi 0.5*pi 0.5*pi 0.5*pi h h h h h nr nr nr nr dnr nz nz nz nz dnz 0 0 0 0 0 0 0 0 0 0 1 nr nz 0 0 c0 0 0 0 0 0 {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,2,3,4,4,4,1,3,5,3,3,6,3,3,3} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} {"0","0","0","0","0"} 1 2 3 4 4 1 1 1 1 1 1 1 1 1 1 1 {"","","","",""} {"","","","",""} {"","","","",""} {"","","","",""} {"u","v","p","Pinl_chns","c"} 0 {0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,1,2,2,1,1,1,1,1,1,1,1,1,1} 10 c*k*M_Si/rho_Si Delta_Si Silicon deposition rate elcplextr {"1"} {} elcplscalar {"1"} {} {} elcplscalar {"1"} nojac(rho_chns) nojac(1) nojac(max((+(u)^2+(v)^2),(eta_chns/rho_chns/h)^2)) nojac(-1/max(emetric(u,v),(visc_vel_fact_chns*eta_chns/rho_chns)^2*emetric2)) ref ref ref ref ref ref ref ref t0 0 0 0 0 0 0 0 0 {"1"} {"2"} {"rhoint_g1_chns","vol_g1_chns","u2int_g1_chns","mdt2_cfl_g1_chns"} {"1","2","3","4"} {"4"} elconst nojac(sqrt(-mdt2_cfl_g1_chns)) elcplextr {"1","2"} v u 1 1 1 1 {"1"} {"2"} 2 2 {"1"} {"2"} {"v_2D","u_2D"} local {"r","z"} local {"sqrt(x^2+z^2)","y"} local {"x","y"}

626 geom on on off on on on on 0.1 t 0 {"x","y","z"} {"xyz"} 1 on 1
coefficient
SI {1,1} {} {0,0} {0,0} {1,1} {} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1} {} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1} {} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0} {1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1,1} u_2D*sin(atan2(x,z)) v_2D u_2D*cos(atan2(x,z)) sqrt(u_3D^2+v_3D^2+w_3D^2) u_3D u-component, 3D w_3D w-component, 3D v_3D v-component, 3D Velocity_3D Magnitude of 3D velocity

40[mm] 2.5[mm] 0.5[mm] 2*(R_a^2+R_a*d_w)/(R_a^2*d_cc) 25[Pa] 5e-5[m^2/s] D_amb*1.013e5[Pa]/p_tot D*(1-d_w/d_cc) 8.06e-3[m/s] 28[g/mol] 28[g/mol] 32[g/mol] 8.314[J/(K*mol)] 600[degC] p_tot*(0.2*M_SiH4+0.8*M_N2)/(R_g*T_r) 3.1e-5[Pa*s] 0.2*p_tot/(R_g*T_r) 1[m/s] 2e3[kg/m^3] R_a*v0*rho/eta D Pressure-corrected diffusivity eta Dynamic viscosity v0 Inlet axial flow velocity M_N2 Molar mass, N2 D_amb SiH4 diffusivity in air at 1 atm R_a Wafer radius Re Reynolds number p_tot Total system pressure T_r Reactor temperature M_Si Molar mass, Si R_g Ideal gas constant k Rate constant S_a Specific surface area d_cc Wafer spacing D_eff Effective diffusivity in wafer bundle rho_Si Silicon density d_w Wafer thickness c0 Inlet concentration, SiH4 M_SiH4 Molar mass, SiH4 rho Gas density {0} {0} chns weak uq~ t` off stationary parametric auto 1.0E-6 25 tol 100 1 off on on 1.0 1.0E-4 10.0 off on 0.0010 25 lumped automatic auto on 1 4 tol 10 1 off const 1.0 minimal 1.0 1.0E-2 10.0 0.0010 0.01 range(0,0.1,1) 0 1 0.1 11 step none tlist free bdf_ida 0.01 off 15 off on on on on on on off on on 1E-6 5 1 1.0 0.75 linear off off maybe bweuler 1 off 6 0 300 0.0 0 lambda 0 v0 1 1.5 2 step none off 1 off 0.0 0.0 0.0 on auto auto auto eliminate auto 1000 on none on off off on off currgeom l2 10000000 longest weak off 0 1 2 1 fltpft 2 1.7 0.5 0.5 on off off sensitivity adjoint on cholesky adjoint 500 10 1.0e-6 1.0e-6 1.0e-6 1.0e-6 0 off v,u,c,p v,u,c,p on init_expr_currsol_radio Automatic 0 u_init_radio Automatic 0 off off off off pardiso linsolver 0.0 0.1 0.7 mmd on off nd on 1.0E-8 on off tol 2 1.0E-6 400.0 10000 left right 1 50 1 1.0 3 6 v 5000 128.0 off 2.0 on droptol p Pinl_chns gmres 0.02 100 0.8 off off shape regular on 2 2 off Geom1 Geom2 on on u v p 1e-3 1 pardiso linsolver 0.0 0.1 0.7 mmd on off nd on 1.0E-8 on off tol 2 1.0E-3 20.0 10000 left right 1 50 1 1.0 3 6 v 5000 128.0 off 2.0 on droptol p Pinl_chns gmres 0.02 100 0.8 off off shape regular on 2 2 off Geom1 Geom2 on on c 1e-3 1 pardiso linsolver 0.0 0.1 0.7 mmd on off nd on 1.0E-8 on off tol 2 1.0E-6 400.0 10000 left right 1 50 1 1.0 3 6 v 5000 128.0 off 2.0 on droptol p Pinl_chns gmres 0.02 100 0.8 off off shape regular on 2 2 off Geom1 Geom2 on on 1 iter 0.5 1 1 20 10 1.0E-2 1 const off 1.0 1.0E-4 1.0E-2 10.0 minimal onevery 2 iter 0.5 1 1 20 10 1.0E-2 1 const off 1.0 1.0E-4 1.0E-2 10.0 minimal onevery off off off none 1E-6 1000 p Pinl_chns pardiso p Pinl_Navier_Stokes pardiso 1 1000 on 1 none on 1000 1E-6 p Pinl_Navier_Stokes pardiso 1E-6 on none none pardiso on p Pinl_chns 1 1000 1 1E-6 Geom2 0 off on off 1021321 COMSOL 3.5.0.603 Boat Reactor for Low Pressure Chemical Vapor Deposition COMSOL COMSOL Copyright (c) 1994-2007 by COMSOL AB www.comsol.com 1242068522013 1188164660585 off html off a4 off full off Geom1 subdomain 1 -0.13258929098291058 0.13258929098291058 -0.00900000035762788 0.18900000751018525 -1.0 1.0 0.02 0.02 0.02 -1.3181223852366508 1.3181223852366508 -1.1214844556357735 1.1214844556357735 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m/s {"U_chns"} off m/s Rainbow off on on 255,0,0 interp fill off {"U_chns"} on off m/s {"U_chns"} off m/s {"U_chns"} on off m/s Rainbow off on on 255,0,0 20 off off step none off off {"U_chns"} on on off m/s {"U_chns"} off m/s Rainbow off on on 255,0,0 interp on sub {"u","v"} off m/s {"",""} off {"U_chns"} off m/s 15 off 25 off step none step none arrow proportional 255,0,0 off 2 off off {"U_chns"} off m/s 8 off 8 off step none step none arrow proportional 0,153,0 on 1 off {"u","v"} m/s off 255,0,0 {"U_chns"} m/s Rainbow off on {"U_chns"} off m/s 20 sub off step none step none 0.001 0.01 0.01 Inf 5000 on off 0.05 20 off 1 0.5 1.3 0.5 none off mass lines khanforce_chns radius,partr,1e-4 4*pi/3*1e-9 {"sign(u-partu)*pi*partr^2*rho_chns*(1.84*(abs(u-partu))^(2/3.45-0.31)*(2*partr*rho_chns/eta_chns)^(-0.31)+0.293*(abs(u-partu))^(2/3.45+0.06)*(2*partr*rho_chns/eta_chns)^0.06)^3.45","0","sign(v-partw)*pi*partr^2*rho_chns*(1.84*(abs(v-partw))^(2/3.45-0.31)*(2*partr*rho_chns/eta_chns)^(-0.31)+0.293*(abs(v-partw))^(2/3.45+0.06)*(2*partr*rho_chns/eta_chns)^0.06)^3.45"} {"u","v"} m/s on {"0","0","0"} partstart_explicit 10 off step none {"0","0"} step none step none off 255,0,0 {"U_chns"} m/s Rainbow off on 255,0,0 on 1 once step none stick 0.001 off {""} {""} off on on 0.001 partt off 5 0.001 off {"",""} {"",""} off on on 0.001 {"partu","partv","partw"} partt off 5 off {"U_chns"} off on m/s {"U_chns"} off off m/s on off on 3 {"Geom1"} 0 2 stored step none on on off all on off off on on {"u","v"} m/s {"",""} on 1 0,1,2 stored step none moviefile AVI 640 480 10 full 11 off off off {"c"} off mol/m^3 0 2 stored step none off auto 4 on {"U_chns"} off m^2/s 0 2 stored step none off auto 4 on {"U_chns"} off m^3/s 0 2 stored step none {"Delta_Si"} on 3.4843355777561076 4.001257185881485 on off nm/min Rainbow off on on 255,0,0 interp fill off {"U_chns"} on off m/s arc off {"U_chns"} m/s solid cyclecolor none off off 255,0,0 Rainbow off on on 255,0,0 interp fill {"c"} off mol/m^3 off {"c"} mol/m^3 solid cyclecolor none off off 255,0,0 255,0,0 0 0,1,2 stored step none off Si deposition rate [nm/min] on on {"lin","lin"} on on 6 0 off {"U_chns"} off m/s arc off {"U_chns"} m/s solid cyclecolor none off off 255,0,0 Rainbow off on on 255,0,0 interp fill 200 {"0","1","0","0"} 5 off off step none {"U_chns"} off m/s off {"U_chns"} m/s solid cyclecolor none off off 255,0,0 {"0","0"} step none step none 255,0,0 0 0,1,2 stored step none on on on {"lin","lin"} on 0 {"c"} off mol/m^3 element 2 {"U_chns"} off off m/s element 2 {"U_chns"} off off m/s 10 off 10 off step none step none element 2 0 0,1,2 stored step none on ptd off 2 coorddata off off on 0 2 stored step none step none {"U_chns"} off m/s {"0","0"} {} {} off solid cyclecolor none off off 255,0,0 on on on {"lin","lin"} 0 0,1,2 stored step none {} {} {} 0 0,1,0,0,0,1,0,0,0 0,1,0,0,0,0,1,0,0,0,0,1 Geom1 Geom2 10 0 up on off 128,128,128 off on 192,192,192 on 0,0,0 off all 1 random Rainbow off on Geom2 post -1 -0.05999999865889549 0.05999999865889549 0.0 0.18000000715255737 -0.05999999865889549 0.05999999865889549 0.05 0.05 0.05 -1.2670675869820849 1.2670675869820849 -0.9323704885339871 0.9323704885339871 -11.399769112014981 3.919271528925391 3.732275271172176 -0.00946719385226985 0.8896135622893385 -0.02035021466417953 0.3828019147107139 0.4199725911152408 0.8228521840560198 point headlight on 255 255 255 -11.399769 3.9192715 3.7322752 directional light 1 on 255 255 255 1.0 -1.0 1.0 directional light 2 on 255 255 255 -1.0 1.0 -1.0 directional light 3 on 255 255 255 -1.0 -1.0 1.0 directional light 4 on 255 255 255 1.0 -1.0 -1.0 on on on on off on on on on on on on off off off off 1.0 1.0 1.0 size cycle on off 0.5 orbit none none off off off off on off off on on on on on off intersection 1.0 normal off 2 10.0 off on off on off off on on 5 on 1 0.6 1.5 0.03 0.5 20 1.0 1.0 1.0 on 0 longest {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""} {"tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri","tri"} {"",""} {"",""} off {"Velocity_3D"} on 0.0 2.883843313408995 on off 1 off 1 off 1 off step none step none step none Rainbow off on on 255,0,0 interp fill off {""} on off 5 off step none {""} on off Rainbow off on on 255,0,0 interp fill off 1 random {""} on on off Rainbow off on on 255,0,0 interp fill off {""} on on off Rainbow off on on 255,0,0 interp fill off {""} on on off Rainbow off on on 255,0,0 interp off sub {"u_3D","v_3D","w_3D"} off {"","",""} off {"","",""} off 10 off 5 off 10 off step none step none step none arrow3d normalized 255,0,0 off 1 off 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