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Micromachined Silicon Integrating Cavities for Far-Infrared Bolometer Arrays
发布日期 2014
We are investigating gold-plated micromachined silicon integrating cavities for arrays of far infrared Transition Edge Sensor bolometers. We present the results of our simulations and show how we used COMSOL Multiphysics® software to optimize the geometry of the integrating cavity. We show that we can achieve a high optical efficiency over a wide frequency range.
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- audley_poster.pdf - 1.64MB
- audley_abstract.pdf - 0.43MB