论文和技术资料

Quasi-static 2D-MEMS vector scanners are micro-opto-electro-mechanical systems (MOEMS) made of monocrystalline silicon. The primary application for these controllable micromirrors is the high dynamic and precise deflection of laser beams, for example in light detection and ranging (LiDAR) or optical coherence tomography (OCT) systems. Despite the challenging system integration, hybrid-integrated electromagnetic (EM) drives (i.e. moving magnet drives) offer very high energy densities compared to conventional monolithically integrated electrostatic drives and hence allow for new MOEMS design possibilities. However, for rapid exploration and simulation of new design variants, as well as for the development of control algorithms, numerical and analytical modeling of an EM drive is indispensable. In this work, a finite element (FE) model of a moving magnet drive is presented using COMSOL's AC/DC module for a magnetostatic analysis. The driving torque on a NdFeB permanent magnet within the magnetic field generated by the EM drive is calculated for a set of predefined deflection angles and compared to an analytical model. The results of the numerical simulation showed strong agreement with the analytical model. Furthermore, the suitability of the proposed EM drive concept for actuating a quasi-static 2D-MEMS vector scanner was determined.