Polyimide Thermal Micro Actuator
Joule heating is simulated in COMSOL Multiphysics® software for the electro-thermal micro actuator. The aim is to choose the optimal design parameters to get the largest possible in-plane displacement. The comparison between the different possible configurations will reveal the optimal parameters for the longest displacement. Our current micro fabrication process allows the actuator to use different metal configurations and choosing the best one is the goals. Generating heat in the actuator can change the material properties of polyimide and the original structure can be deformed without being able to come back to its original form. Polyimide has a decomposition temperature of 400˚. Therefore, we are interested in the maximum temperature in the micro actuator.
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- arevalo_poster.pdf - 5.37MB
- arevalo_paper.pdf - 1.32MB
- arevalo_abstract.pdf - 0.08MB