论文和技术资料

In the framework of the EURAMET project 16NRM05, a novel ionization gauge was developed. The goal was to develop a more stable ionization gauge that could be suitable for standardization. The AC/DC Module and the Particle Tracing Module in COMSOL® have been used to design and model the geometry in order to achieve optimal ionization and ion collection efficiency with the least background signal. The Particle Tracing Module was useful both to compute the electron and the ion current in order to extrapolate the sensitivity of the gauge. The values are agreeing with the experimental values to within 1%. The simulations were also used to explain experimental observations, in particular the effect of a tilted cathode position.