论文和技术资料

O. Myers [1], M. Anjanappa [2], and C. Freidhoff [3]

[1] Mississippi State University, Mississippi State, MS, USA
[2] University of Maryland Baltimore County, Baltimore, MD, USA
[3] Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA

R. Pryor
Pryor Knowledge Systems, Inc., Bloomfield Hills, MI, USA

X. Wang, R. Guthrie, and M. Isac
McGill Metals Processing Centre, Montreal, Canada.

T. Klose[1], H. Conrad[2], T. Sandner[1], and H. Schenk[1]

[1]Fraunhofer Institute Photonic Microsystems (FhG-IPMS), Germany
[2]TU Dresden, Semiconductor and Microsystems Technology Laboratory, Germany

I. Neitzel[1], U. Prüfert[2], and T. Slawig[3]
[1]DFG priority program SPP 1253, Technische Universität Berlin, Berlin, Germany
[2]DFG research center Matheon, Technische Universität Berlin, Germany
[3]DFG Cluster of Excellence The Future Ocean, DFG priority progam SPP 1253, Christian-Albrechts-Universität zu Kiel, Kiel, Germany

E. Le Guen[1], R. Fabbro[1], F. Coste[1], M. Carin[2], and P. Le Masson[2]
[1]LALP (CNRS)/GIP GERAILP, Arcueil, France
[2]LIMATB, Université de Bretagne Sud, Lorient, France

Peter Steeneken
Project Leader
RF MEMS Research Group
NXP Semiconductors
Eindhoven, The Netherlands

N. Ghasem[1], M. Al-Marzouqi[1], N. A. Rahim[1]
[1]United Arab Emirates University, Al-Ain, United Arab Emirates

M. Ainslie[1], J. Zou[1], D. Hu[1], D. Cardwell[1]
[1]Department of Engineering, University of Cambridge, Cambridge, UK

G. Tranquille[1]
[1]CERN, Geneva, Switzerland