Introduction to Inductively Coupled Plasma and Microwave Plasma Modeling
In Part 4 of this course onmodeling nonequilibrium plasmausing COMSOL Multiphysics®and the Plasma Module, we take a closer look at theInductively Coupled Plasmainterface. We go over what type of modeling the interface is used for as well as the physics that the interface combines. You will also see a breakdown of what each constituent physics interface under theInductively Coupled Plasmamultiphysics interface solves for and how the multiphysics are coupled. This includes the:
- Plasmainterface — solves for plasma in the time domain
- Magnetic Fieldsinterface — solves for magnetic vector potential in the frequency domain
- Plasma Conductivity Couplingfeature — couples the plasma conductivity with theMagnetic Fieldsinterface
- Electron Heat Sourcecoupling feature — couples the power deposition for electrons with thePlasmainterface
We also discuss the additional multiphysics couplings that are available, such as theCollisionless Heating Couplingfeature.
Following this review, we encourage you to follow along as we demonstrate how to build a model of aGEC ICP (inductively coupled plasma) reactorstep by step. The collision cross-section data that needs to be imported during the demo using thePlasmainterface >Global>Cross Section Importoperation can be found in the linked Application Gallery entry. We also show how to create a user-defined mesh to discretize the model geometry, and explain the logic in doing so for the plasma domain rather than other domains, such as the coil.
We then provide a similar introduction to theMicrowave Plasmainterface. We will cover:
- What it solves for and the equations involved
- How it combines thePlasmainterface andElectromagnetic Waves, Frequency Domaininterface
- How the physics are coupled
When discussing the multiphysics coupling for the plasma conductivity, there is a special emphasis on theCompute Tensor Plasma Conductivitysection within the settings.
There is then another guided model demonstration, this time of a model that simulatesin-plane microwave plasma, where a wave is launched down a waveguide and intersects a flowing gas. The results between launching a transverse electric (TE) and transverse magnetic (TM) wave are compared. Following the demo, we briefly discuss the resonance zone and thePortboundary condition before sharing other resources for learning about microwave plasmas, including our"Microwave Plasmas"blog post.
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