%PDF-1.4 1 0 obj << /Title (FEM Correlation and Shock Analysis of a VNC MEMS Mirror Segment) /Producer (wkhtmltopdf) /CreationDate (D:20141031190813) >> endobj 4 0 obj << /Type /ExtGState /SA true /SM 0.02 /ca 1.0 /CA 1.0 /AIS false /SMask /None>> endobj 5 0 obj [/Pattern /DeviceRGB] endobj 9 0 obj [0 /XYZ 62.4599999 723.779999 0] endobj 10 0 obj [0 /XYZ 62.4599999 540.419999 0] endobj 11 0 obj << /Type /Catalog /Pages 2 0 R /Dests << /__WKANCHOR_0 9 0 R /__WKANCHOR_1 10 0 R >> >> endobj 6 0 obj << /Type /Page /Parent 2 0 R /Contents 12 0 R /Resources 14 0 R /Annots 15 0 R /MediaBox [0 0 612 792] >> endobj 14 0 obj << /ColorSpace << /PCSp 5 0 R /CSp /DeviceRGB /CSpg /DeviceGray >> /ExtGState << /GSa 4 0 R >> /Pattern << >> /Font << /F7 7 0 R /F8 8 0 R >> /XObject << >> >> endobj 15 0 obj [ ] endobj 12 0 obj << /Length 13 0 R /Filter /FlateDecode >> stream x]Mo6W\ k,Cz(z(Eus߯v|ސʎ4DǛ7á|˻˻($y'͟wo4ۇ/cFۯQwd}S/Q&&I6?ʪtcRc￢_N>MYIQ˜mYE1#w4o7&qqݔOBvZi72e7əӈmGHa$ۍ:pIFv$;#0p^X>/淹qigzI#GVQ1ʕ9<G@՜@ \>IhOh{}O09di,q$qSE45(US^vx!*n4,8Xs(fLokŰKwKjCk+懤|3U<NkyHjA`ɨshX͂{nEdn7.T6 Z V$[P5X6uC/hsۏbX4dbug @PC/`nni~(QF2E >\7r4"[$j@E.Sfsu}6`зd ~pjAuE CV8t؝"w n`"E@h>喱MF,זsy@4rXL ~UHMWTAA'( \߈)1W02G,(r #Q 앫*ܡ4`F@_8k|FxAY3 y`f]"98 qBry x1LV *#ձ)~̋FX.CH%-3!ҘFxXY[5 r09@F3 (A&}oʜFeN?7!FeH#/p"@ SlNہC! 5].FGPtؗCHbTnq"ONU w>&?2Ԃ^._Jvhl^f֟l125K=J۲YeGpFE9\=DPN~@h[H/@/g8Wx )^\PP\ ^ 9RN3zK|@3@;]\4px_4vN_-Ywe^lRX 8-9숇ĕ|n'4H 8o@J߽$-A`Q :Ds.)yF!,iK?N* vp@!'0SzVe/ȟW LK> endobj 17 0 obj << /Length1 9844 /Length 20 0 R /Filter /FlateDecode >> stream xz tՕvݪ^ԭw꽪UՋw%ٲ$Umɖ1C8$! a ! aΉx20gNKVuK^L)W~ BJ4$ںwS埼33qbÔxΥq.ugzvmRc?ݺ}rƟ83;q8vlէ8>CK*)#28vKø]4Ь֙0LgƩ4&րF30sb+;#R Q<iۛklioɛ@&?P }h#meF=9wsQ {t?a."/:ғN4~h z]F~wQv?-@8xyM7LΔfXiM1‘~n$ђH=-YKZuR>gFȊ6yOa`3APDk^(rKh%&3/fY1PD9KSHiG$?O!؄I*p+_e& ܐ1E=e /޷& 1Y2-̮vͳ9<`M6y^OtP5vv芯} @j9]b#ڟQءnPE f]lΓtE6($q5JE`0},U Ya]SKM{al=euP|4oKrlWjQ(*uAXew*uર=]܅ =7*z2kCwSʚ nlZhqb@ܣ0ZM, su]|h.FCS9wVzZܼm\3.J> (z3op{n ]3iwO޸,čTNRbSX&#-CB^ꤝ۔)NmbR[M@&fMNE"^+y N|STUw,施;vֽg7w7lvΦ1t-sn t8B[/w:EI]BggD .6 .LKKix% kL[*B_ۤJJuum AnҢ_ px2Snd?,!0*'9W)ŤC2bU>4iZEb[jw`& hʹӥ1FXp&()(wF>#2א0X;랮w2Ӟ!Z 7ç3 7XO.*+)0ZF'ZÃy"IܺbHGvtԃ6 f|&3b-Ӟ{upk̒XWNeCG<}_jKer_N}y-J~ҪvlU8;d%oH 0DǴN0 Xxy혺n-w3zv#K'٭~A]1xϡeK)%%ü!T UiGrVCM0aһ̌Ι4x+]}!ʎζpi+PW.Ve0MX8c;HWcR"e!e2(3ɼD -=+LTc:R*._؎#ӽ!}vCkRp8l[ozuZ][T+6>4(2AJRK|"h)lҖ j)|K3*$y5KM+/LѢJ4 ŷ|]w͞jEx buOf֮ ߞ36xS+0|%FRv}CyvS$dh5ȝ6 $S󟊽$Uksm~g wˠAKwd@6]_$`ޡM ɷDrEy*)T#F!ϭMᢁAYo{*"\lt;¦>q׭,mZQ+sZe2 m:CaVlv,RH ֑#h{!5\*U2kٞC`=_3 SRBx@M >`FUJWS~l"L8:$Œ@-@TO[#pPe^ Z0؋D%+tia֠._v>#Z4LGVd6f6-Uܙ錑Ǟ )~OB,,ֱKg[7NogE̵iG_6#fQEJT*; aP7x\XVڍ80 F—|z4N%2&XoJn~衤t?ReL'7QhM~`;pUѪ=cBTjNcb]iX\~5rRq]cKYn41|qzu% e&"gvƤj# XIbZ$M9=BཁLIEH:h{ﯝ9:}³io=S3SkSS'.'*Kw>,.$@ܑhl㼕˹6k#^KظKɵDBESZԉ*‘  >ёrPr-@g{ =^vu+?w4Y-_gRZ'%a"G#GGRg.rFxDK::t7*X P-%m;Gm+`_>D=7}X]aM=ws XcwfLg:60?(iYHoYH o5-gSi!%̤1. >Yp?n}2R8Nm_0]t`X"m zȧgTtkaG2y(-F|iCk1̗Ԅ%P7ך-GlZ _bc]Z)&wC!:0Cuy\ ut{z ?n[W{f3zYROo1wѴ¢2.f1%vg?smJB޼[Ϥm?&ejC>p NZ{x\RX̽PtꇿǺ10E؎0<_ye`5ʩ~7uWW \Z1Z{`QTMI\ʦrh1 a1%ډkR6A"b&37w7'tj[_yqzn0lq xDGJ)ܫ1 }yv-h>tQ8lo# v=5ҋ fP/D@=Yu^7*@FG~L_|r08xbi华˘uC BPM/b0 `0YR8܁6ymBʋ,u˱| \R.E%/{m-?Nެ ƢuΞ;o [tY\< ?ḓ_Lm^c-[ kZ;gq׶}kgB]ښ8,55]ldRO!J_*li7.,n+pof1EnM]}R=X:#vyj5$K^`LnS՘Av:DbZZ%*Upn'v\J?/0bRK75f`D=iU =l!ڰ<#^f?̎x~NB+bO?7vṮROX+.&(bpҔ";ܜmm\`&~5y<цei;{u=A U;㙩?=Ɲ)1{Q G)E@Vf8K/iJz4wR[3\Xk[9ɲ?J#63:x4K>(8/mjH\KRI{OeH8T,*jײGQ|ޣs_;ByP<ыL@DnV0_qTR'$vEO*tŸkM M'h>Qȼ|!ݟt*j"~ixyo{ eJ{Tm 6&oSIrsڝpdG}g4ihg9c 굆]ws|loj9cXD~2B51-]zgLfA`qBVCdXl[Ibgι$2[)C1/$n'R={c R]~-$u"%I5i`S̽.eDn;NLNE +zj =%YjdqDFϟ$^9 pQnLokn CX=Wl;;ʺZWJ`l?6»FeXo +@H sDGtB ŋIq.zmx񺄿n~=x5HmD>$%IVr~h1k;(1M.nq_L9?xj98VzxI؏L8"/)nLj=㤁L~WJLm8QOxSI~ɇҸtJ/-ɴݲq˕Tr/.iUMu@u^kC=&y][]A|QGLuH?|G{PA|/~vbLLn1 FZA,#Fˣ8oKljuh#6g.k,m]KkLLUӸ 6w#aۊ33x!<W\CWM"w1 RDnX> /FontDescriptor 16 0 R /CIDToGIDMap /Identity /W [0 [496 606 248 248 716 496 496 440 496 496 496 248 662 606 496 496 882 716 440 276 772 496 330 440 496 276 496 552 716 386 276 606 716 716 662 496 662 716 716 716 496 552 330 716 496 330 330 496 179 716 330 386 440 496 330 754 992 496 ] ] >> endobj 19 0 obj << /Length 763 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <0039> [<0045> <002E> <0020> <0041> <0067> <0075> <0061> <0079> <006F> <0031> <002C> <0052> <004C> <006E> <0032> <004D> <0048> <0065> <006C> <006D> <0062> <0072> <0063> <0068> <0074> <0033> <0053> <004B> <0073> <0069> <0054> <004E> <0077> <0043> <0070> <0042> <0044> <0055> <0047> <0064> <0046> <0049> <004F> <006B> <0028> <0029> <0076> <0027> <0056> <0066> <004A> <007A> <0078> <002D> <00AE> <2014> <0071> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 8 0 obj << /Type /Font /Subtype /Type0 /BaseFont /NimbusRomNo9L-Regu /Encoding /Identity-H /DescendantFonts [18 0 R] /ToUnicode 19 0 R>> endobj 21 0 obj << /Type /FontDescriptor /FontName /QVAAAA+NimbusSanL-Bold /Flags 4 /FontBBox [-173 -307 1097 979 ] /ItalicAngle 0 /Ascent 979 /Descent -307 /CapHeight 979 /StemV 69 /FontFile2 22 0 R >> endobj 22 0 obj << /Length1 3428 /Length 25 0 R /Filter /FlateDecode >> stream x}V{PT?߽wwy(Xua˾# dQT!K_*M|Lk[4ژcql8QgLksw$}ܻgsw~w.Bdi^Ñm49[.b'[q' OQnm~o_ܤy#Mot%Dy/Q[~jԠ|8O/ʪ י].fr``TjGmgk65n+ 0!bAT Scs>`/ntz3m"twDE=$F֊bF:?X&3fJ,,h4#RerL&mIJ⟟wSG&_5잚w `p+H} o/\^_o}?|fE GE/ns8' !+e/=A'4]PSL)u%Kv_bn7h Ӭƾ?WCe% C#1n|` qF A9#U'q2j켏wZI"n6'B(TFk1dN9X;vAХ'v4홍` V"ARA롾}gv}[yE3W.`$#idaRmg"UƒE?Q 4R-ZrE,@pݤ1[,T5Pυ&/10Ys,)eDJe2IV;= UXdrXhZEBVU1󀍙dqy6=UɅ"qC\ ^\g3Oj@:$J0mpXRgd(s#iqPiJ͋ |=ٓQfE yZ5҄\pEZ]T\*_eLiH`RWp R/-Kz "B=1i(MOR)-*'P /wA9Yۗ=qyf/:MyKV:?_o=9=(.|5@(<sAaJ|p B֋X N\ t/kV%@Lw$Qi*syj[^SkKALvuϴ(ԍ=e_g1.ϠdVrZ9~`Ce|XnN45s[敃6[ouJJu TQ?/>S<(ڰw.xLiA?hdLTI'0JjpUApliQ8X&]!n33{=NDAz-*G=Fo lp nƗ3Ǚ[\6-b_ps857]8D ܟ\޾DB#D֒5NHIBJzwד4""t PxG`kfnՊoὖ4uV+El/Wı6YBr-jw[fOQ${)y{&bGvoF9θA0`3ڄ~oo<6?h#d8 endstream endobj 25 0 obj 2533 endobj 23 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /NimbusSanL-Bold /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 21 0 R /CIDToGIDMap /Identity /W [0 [496 606 662 826 276 716 606 386 552 276 552 330 276 606 606 662 606 552 552 716 552 552 330 662 716 606 882 606 ] ] >> endobj 24 0 obj << /Length 553 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <001B> [<0046> <0045> <004D> <0020> <0043> <006F> <0072> <0065> <006C> <0061> <0074> <0069> <006E> <0064> <0053> <0068> <0063> <006B> <0041> <0079> <0073> <0066> <0056> <004E> <0067> <006D> <0062> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 7 0 obj << /Type /Font /Subtype /Type0 /BaseFont /NimbusSanL-Bold /Encoding /Identity-H /DescendantFonts [23 0 R] /ToUnicode 24 0 R>> endobj 2 0 obj << /Type /Pages /Kids [ 6 0 R ] /Count 1 /ProcSet [/PDF /Text /ImageB /ImageC] >> endobj xref 0 26 0000000000 65535 f 0000000009 00000 n 0000016042 00000 n 0000000000 00000 n 0000000225 00000 n 0000000320 00000 n 0000000564 00000 n 0000015901 00000 n 0000011973 00000 n 0000000357 00000 n 0000000408 00000 n 0000000460 00000 n 0000000881 00000 n 0000003259 00000 n 0000000685 00000 n 0000000861 00000 n 0000003280 00000 n 0000003492 00000 n 0000010709 00000 n 0000011159 00000 n 0000010688 00000 n 0000012117 00000 n 0000012326 00000 n 0000014970 00000 n 0000015297 00000 n 0000014949 00000 n trailer << /Size 26 /Info 1 0 R /Root 11 0 R >> startxref 16140 %%EOF